Amorphous GexSi1-x and GexSi 1-xOy thin films for uncooled microbolometers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5783, Issue PART II, 2005, Pages 597-606

  Rana, Mukti M ^a   Butler, Donald P ^a  

^a University of Texas at Arlington   (United States)

Author keywords

Microbolometers; Silicon germanium; Uncooled infrared detection

Indexed keywords

AMORPHOUS MATERIALS; BOLOMETERS; CONCENTRATION (PROCESS); DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; GERMANIUM COMPOUNDS; SPUTTERING; THERMOMETERS;

ATOMIC COMPOSITION; MICROBOLOMETERS; SILICON GERMANIUM; UNCOOLED INFRARED DETECTION;

THIN FILMS;

EID: 26444503070     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.603839     Document Type: Conference Paper

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