Uncooled low-cost thermal imager based on micromachined CMOS integrated sensor array

Journal of Microelectromechanical Systems

Volumn 10, Issue 4, 2001, Pages 503-510

  Schaufelbühl, Andri ^b   Schneeberger, N ^b   Münch, Ulrich ^b   Waelti, Marc ^b,c   Paul, Oliver ^a,d   Brand, Oliver ^b   Baltes, Henry ^b   Menolfi, Christian ^a,b   Huang, Qiuting ^a,b   Doering, Elko ^e   Loepfe, Markus ^c  

^a IEEE

^b ETH ZURICH   (Switzerland)

^c Siemens Schweiz AG   (Switzerland)

^d UNIVERSITY OF FREIBURG   (Germany)

^e EM Microelectronic   (Switzerland)

Author keywords

Complementary metal oxide semiconductor (CMOS); Infrared sensor array; Thermal imaging; Thermoelectric sensor

Indexed keywords

CMOS INTEGRATED CIRCUITS; MICROMACHINING; POLYETHYLENES; TEMPERATURE MEASUREMENT;

INFRARED SENSOR ARRAYS;

INFRARED IMAGING;

EID: 0035652150     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.967372     Document Type: Article

References (21)

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