First demonstration of 25 μm pitch uncooled amorphous silicon microbolometer IRFPA at LETI-LIR

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5783, Issue PART I, 2005, Pages 432-440

  Yon, J J ^a   Astier, A ^a   Bisotto, S ^a   Chamingis G ^b   Durand, A ^a   Martin, J L ^b   Mottin, E ^a   Ouvrier Buffet, J L ^a   Tissot, J L ^c  

^a CEA LETI   (France)

^b CEA GRENOBLE   (France)

^c ULIS   (France)

Author keywords

Amorphous silicon; IRFPA; Microbolometer; Uncooled IR detector

Indexed keywords

AMORPHOUS SILICON; BOLOMETERS; COST EFFECTIVENESS; PARAMETER ESTIMATION; THERMAL INSULATION;

IRFPA; MICROBOLOMETER; UNCOOLED IR DETECTORS;

INFRARED DETECTORS;

EID: 26444507918     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.606487     Document Type: Conference Paper

References (6)

1. : JJ. Yon, E. Mottin, L. Biancardini, L. Letellier, J.L. Tissot, "Infrared microbolometer sensors and their application in automotive safety", AMAA 2003 Yearbook, pp.137 - 157, S. Krueger, W. Gessner editors, Springer-Verlag, ISBN 3-540-00597-8.
2. : E. Mottin, J.L. Martin, J.L. Ouvrier-Buffet, M. Vilain, A. Bain, J.J. Yon, J.L. Tissot, J.P. Chatard, "Enhanced amorphous silicon technology for 320×240 microbolometer arrays with a pitch of 35μm", Proceedings of SPIE, Conf Orlando 2001, Vol. 4369, pp. 250-256.
3. : J.L. Tissot, F. Rothan, C. Vedel, M. Vilain, J.J. Yon, "LETI/LIRs amorphous silicon uncooled microbolometer development", Proceedings of SPIE, Conf Orlando 1998, Vol. 3379, pp. 139-144.
4. : P. Robert, SOFRADIR, "Apparatus for detecting electromagnetic radiation", EP 1 431 731 European Patent, 2003.
5. : H. Geoffray, A. Bardoux, M. Laporte, JL. Tissot, "Unccooled infrared microbolometer arrays for Earth remote sensing", Proceedings of SPIE, Conf San Diego 2000, Vol. 4130, pp. 527-536.
6. : M. Kohin, N. Butler, "Performance limits of uncooled Vox microbolometer focal plane arrays", Proceedings of SPIE, Conf Orlando 2004, Vol. 5406, pp. 447-453.