High sensitivity uncooled microcantilever infrared imaging arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6206 II, Issue , 2006, Pages

  Hunter, Scott R ^a   Maurer, Gregory ^a   Jiang, Lijun ^a   Simelgor, Gregory ^a  

^a Multispectral Imaging Inc   (United States)

Author keywords

Bimorph; Imager; Infrared; MEMS; Sensor; Surface micromachining; Thermal

Indexed keywords

BIMORPH; OXYNITRIDE MATERIALS; SURFACE MICROMACHINING; THERMAL;

CANTILEVER BEAMS; CMOS INTEGRATED CIRCUITS; INFRARED DETECTORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; THERMAL NOISE;

IMAGE SENSORS;

EID: 33747637776     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.664727     Document Type: Conference Paper

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