320×240 microbolometer uncooled IRFPA development

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4130, Issue , 2000, Pages 473-479

  Tissot, Jean Luc ^a   Martin, Jean Luc ^a   Mottin, Eric ^a   Vilain, Michel ^a   Yon, Jean Jacques ^a   Chatard, Jean Pierre ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CMOS INTEGRATED CIRCUITS; ELECTROOPTICAL EFFECTS; INFRARED DETECTORS; INTEGRATED CIRCUIT TESTING; PRODUCTION; RELIABILITY; TECHNOLOGY TRANSFER;

INFRARED FOCAL PLANE ARRAY; LONG WAVELENGTH INFRARED RANGE; MICROBOLOMETER;

BOLOMETERS;

EID: 0034462412     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.409888     Document Type: Conference Paper

References (4)