Characterization of bolometers based on polycrystalline silicon germanium alloys

IEEE Electron Device Letters

Volumn 19, Issue 10, 1998, Pages 376-378

  Sedky, S ^a   Fiorini, P ^a   Caymax, M ^a   Baert, C ^a   Hermans, L ^a   Mertens, R ^a  

^a IMEC   (Belgium)

Author keywords

Bolometers; Infrared; Poly SiGe; Responsivity

Indexed keywords

INFRARED DETECTORS; POLYCRYSTALLINE MATERIALS; SILICON ALLOYS; SPURIOUS SIGNAL NOISE; THERMAL CONDUCTIVITY OF SOLIDS; THERMAL INSULATING MATERIALS;

INFRARED BOLOMETERS; THERMAL TIME CONSTANT;

BOLOMETERS;

EID: 0032186924     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.720191     Document Type: Article

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