Thin film ferroelectric materials for microbolometer arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4130, Issue , 2000, Pages 128-139

  Todd, Mike A ^a   Manning, Paul A ^a   Donohue, Paul P ^a   Brown, Alan G ^a   Watton, Rex ^a  

^a DEFENCE SCIENCE AND TECHNOLOGY LABORATORY   (United Kingdom)

Author keywords

Annealing; Ferroelectric; High density interconnect; Microbolometer; Thermal detectors; Thin films

Indexed keywords

ALUMINUM COMPOUNDS; BOLOMETERS; CRYSTAL STRUCTURE; DEPOSITION; FERROELECTRIC MATERIALS; FERROELECTRIC THIN FILMS; HIGH TEMPERATURE OPERATIONS; LEAD COMPOUNDS; METALLIZING; OXYGEN; SILICON WAFERS; SOL-GELS;

FERROELECTRIC CRYSTAL PHASE; INTEGRATED DETECTOR ARRAY; LEAD SCANDIUM TANTALATE FILM; LEAD ZIRCONATE TITANATE SOL-GEL DEPOSITION; MICROBOLOMETER INFRARED DETECTOR ARRAY; SILICON READOUT CIRCUIT; THERMAL TRIALS; THIN FILM FERROELECTRIC MATERIALS;

INFRARED DETECTORS;

EID: 0034460626     PISSN: 0277786X     EISSN: None     Source Type: Journal    
DOI: 10.1117/12.409855     Document Type: Article

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