120×90 element thermopile array fabricated with CMOS technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4820, Issue 1, 2002, Pages 239-249

  Hirota, Masaki ^a   Nakajima, Yasushi ^a   Saito, Masanori ^a   Satou, Fuminori ^a   Uchiyama, Makato ^a  

^a NISSAN MOTOR CO   (Japan)

Author keywords

Au Black; Infrared sensors; Thermoelectric; Thermopiles; Vehicles

Indexed keywords

ABSORPTION; CHARGE COUPLED DEVICES; CMOS INTEGRATED CIRCUITS; GOLD; MOS DEVICES; POLYSILICON; THERMOCOUPLES; THERMOELECTRIC EQUIPMENT; THERMOPILES; VAPOR DEPOSITION;

FOCAL PLANE ARRAYS (FPA);

INFRARED DETECTORS;

EID: 0038663178     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.457719     Document Type: Conference Paper

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