Micro-Mirrors

Comprehensive Microsystems

Volumn 3, Issue , 2007, Pages 1-63

  Hane, K ^a   Sasaki, M ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b TOYOTA TECHNOLOGICAL INSTITUTE   (Japan)

Author keywords

Airy disk; Bessel function; Bosch process; Confocal microscope; Deep reactive ion etching; Digital micromirror devices; Dynamic deformation; Fraunhofer diffraction; Galvanometric mirror; Grating light valve; Huygen's principle; Laser display; Lateral comb drive actuator; Littman configuration; Maskless lithography; Microstar project; Mirror matrix tube; Off axis illumination; Optical switch; Parallel plate type electrostatic actuator; Piezoresistive sensor; Polygon mirror; Pull in instability; Rayleigh criteria; Residual stress; Scalloping; Scratch drive actuator

Indexed keywords

EID: 77955416852     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-044452190-3.00032-X     Document Type: Chapter

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