Continuous-membrane surface-micromachined silicon deformable mirror

Optical Engineering

Volumn 36, Issue 5, 1997, Pages 1356-1360

  Bifano, Thomas G ^b,c,d,e   Mali, Raji Krishnamoorthy ^a,b,e,f   Dorton, John Kyle ^b,e,g   Perreault, Julie ^b,e,h   Vandelli, Nelsimar ^b,e,i,j   Horenstein, Mark N ^b,e,k,l,m   Castañon, David A ^b,e,k,n,o  

^a SPIE ^*

^b Boston University   (United States)

^c DUKE UNIVERSITY   (United States)

^d NORTH CAROLINA STATE UNIVERSITY   (United States)

^e BOSTON UNIVERSITY   (United States)

^f UNIVERSITY OF MUMBAI   (India)

^g Krones Group   (Denmark)

^h P and E Microcomputer Systems

ⁱ MILITARY INSTITUTE OF ENGINEERING   (Brazil)

^j Brazilian Petroleum Company   (Brazil)

^k MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^l UNIVERSITY OF CALIFORNIA   (United States)

^m SPIRE CORPORATION   (United States)

ⁿ TULANE UNIVERSITY   (United States)

^o BAE SYSTEMS   (United Kingdom)

more..

Author keywords

Adaptive optics; Deformable mirror; Micro opto electro mechanical systems; Surface micromachined

Indexed keywords

EID: 6944256666     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.601598     Document Type: Article

References (7)

1. J. M. Younse, "Mirrors on a chip," IEEE Spectrum, 27-31 (Nov. 1993).
2. G. Vdovin and L. Sarro, "Flexible reflecting membranes micromachined in silicon," Semiconductor Sci. and Technol. 9, 1570-1572 (1994).
3. J. E. Pearson and S. Hansen, "Experimental studies of a deformable-mirror adaptive optical system," J. Opt. Soc. Am. 67(3), 325-333 (1977).
4. R. J. Tyson, Principles of Adaptive Optics, Academic Press, San Diego (1990).
5. R. Krishnamoorthy, T. Bifano, and N. Vandelli, "Development of MEMS deformable mirrors for phase modulation of light," Opt. Eng. 36(2), 542-548 (1997).
6. R. Krishnamoorthy, T. Bifano, and G. Sandri, "Statistical performance evaluation of electrostatic micro actuators for a deformable mirror," in Microelectronic Structures and MEMS for Optical Processing II, Austin TX, Oct. 14-15, 1996, Proc. SPIE 2881, 35-44 (1996).
7. S. Timoshenko and S. Woinowsky-Krieger, Theory of Plates and Shells, 2nd ed., McGraw-Hill, NY (1959).