A mems electromagnetic optical scanner for a commercial confocal laser scanning microscope

Journal of Microelectromechanical Systems

Volumn 12, Issue 3, 2003, Pages 243-251

  Miyajima, Hiroshi ^a   Asaoka, Nobuyoshi ^a   Isokawa, Toshihiko ^a   Ogata, Masanori ^a   Aoki, Yukihiro ^a   Imai, Masaharu ^a   Fujimori, Osamu ^a   Katashiro, Masahiro ^a   Matsumoto, Kazuya ^a  

^a OLYMPUS CORPORATION   (Japan)

Author keywords

Closed loop control; Electromagnetic; Laser scanning microscope; Optical scanner; Reliability

Indexed keywords

ACTUATORS; CLOSED LOOP CONTROL SYSTEMS; CRYSTALS; LASERS; MICROMACHINING; MICROSCOPES; NATURAL FREQUENCIES;

LASER SCANNING MICROSCOPE;

SCANNING;

EID: 0037533920     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2003.809961     Document Type: Article

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