Fabrication of optical micro scanner driven by PZT actuators

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 44, Issue 9 B, 2005, Pages 7078-7082

  Kobayashi, Takeshi ^a   Tsaur, Jiunnjye ^a   Maeda, Ryutaro ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Chemical solution deposition; Film; MEMS; Micro scanner; Piezoelectric; PZT

Indexed keywords

ACTUATORS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES;

CHEMICAL SOLUTION DEPOSITION (CSD); OPTICAL MICRO SCANNERS; PZT;

PIEZOELECTRIC DEVICES;

EID: 31844437243     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.44.7078     Document Type: Article

References (14)

1. K. Petroz, E. Ollier, H. Gratsau and P. Mottier: Sens. Actuat. A 73 (1999) 117.
2. J. M. Zara and S. W. Smith: Sens. Actuat. A 102 (2002) 176.
3. H. Miyajima. N. Asaoka, M. Arima, U. Minamoto, K. Murakami, K. Tokuda and K. Matsumoto: J. Microelectromech. Syst. 10 (2001) 418.
4. S. Ahn and Y. Kim: J. Micromech. Microeng. 14 (2004) 1455.
5. J. Tsaur, Z. J. Wang, L. Zhang, M. Ichiki, J. W. Wan and R. Maeda: Jpn. J. Appl. Phys. 41 (2002) 6664.
6. A. Schroth, C. Lee, S. Matsumoto and R. Maeda: Sens. Actuat. A 73 (1999) 144.
7. S. Schweizer, S. Calmes, M. Laudon and Ph. Renaud: Sens. Actuat. A 76 (1999) 470.
8. A. Tuantranont, L.-A. Liew, V. M. Bright, W. Zheng and Y. C. Lee: Sens. Actuat. A 89 (2001) 124.
9. W. Y. Shih, X. Li, H. Gu, W.-H. Shih and I. A. Aksay: J. Appl. Phys. 89 (2001) 1497.
10. C. Lee, T. Itoh, T. Ohashi, R. Maeda and T. Suga: J. Vac. Sci. & Technol. B 15 (1997) 1559.
11. T. Kobayashi, M. Ichiki, J. Tsaur and R. Maeda: Thin Solid Films 489 (2005) 74.
12. T. Kobayashi, J. Tsaur, M. Ichiki and R. Maeda: Proc. SPIE 5276 (2004) 524.
13. ANSYS is a trademark of ANSYS, Inc.
14. Z. Hao, B. Wingfield and M. Whitley: J. Microelectromech. Syst. 12 (2003) 692.