Monolithic MEMS optical switch with amplified out-of-plane angular motion

2002 IEEE/LEOS International Conference on Optical MEMs, OMEMS 2002 - Conference Digest

Volumn , Issue , 2002, Pages 165-166

  Lopez D ^a   Simon, M E ^b   Pardo, F ^b   Aksyuk, V ^b   Klemens, F ^a   Cirelli, R ^a   Neilson, D T ^b   Shea, H ^b   Sorsch, T ^a   Ferry, E ^a   Nalamasu, O ^a   Gammel, P L ^a  

^a AGERE SYSTEMS   (United States)

^b NONE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROSTATIC ACTUATORS; MIRRORS;

ACTUATED SURFACES; AMPLIFICATION MECHANISM; ANGULAR MOTIONS; MICRO-MACHINED; MONOLITHIC MEMS; OPTIC SWITCHING; OUT-OF PLANE;

MOEMS;

EID: 84963716143     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2002.1031494     Document Type: Conference Paper

References (8)

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2. J. A. Walker, "The future of MEMS in telecommunications networks," J.Micromech. Microeng. 10, R1-R7 (2000).
3. D. J. Bishop, C. R. Giles, and S. R. Das, "The Rise of Optical Switching", Scientific American, Jan 2001, p. 88.
4. D. T. Neilson et al; "High dynamic range channelized MEMS equalizer filter"; Proceedings Optical Fiber Communications 2002, March 2002.
5. D.M.Marom et al., "Wavelength selective 1x4 switch for 128 WDM channels at 50 GHz spacing" Optical Fiber Communications 2002, March 2002.
6. V. A. Aksyuk, M. E. Simon, F. Pardo, S. Arney, D. López and A. Villanueva; "Optical MEMS design for telecommunication applications", Hilton Head 2002.
7. G. T. A. Kovacs; "Micromachined Transducer Sourcebook", McGraw-Hill, 1998.
8. Jie Yang, Harold Kahn, An-Qiang He and Stephen M. Phillips; "A New Technique for Producing Large-Area As-Deposited Zero-Stress LPCVD Polysilicon Films: The MultiPoly Process", IEEE Journal of Microelectromechanical Systems 9, 485, 2000.