Piezoelectric 2D-optical micro scanners with PZT thick films

Integrated Ferroelectrics

Volumn 80, Issue 1, 2006, Pages 341-353

  Yasuda, Y ^a   Akamatsu, M ^a   Tani, M ^a   Iijima, T ^b   Toshiyoshi, H ^c  

^a STANLEY ELECTRIC CO LTD   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^c INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; FREQUENCIES; LASER APPLICATIONS; MIRRORS; SCANNING; THICK FILMS;

ARC DISCHARGE REACTIVE ION-PLATING METHOD; ELLIPTICAL MIRRORS; OPTICAL SCAN ANGLES; PIEZOELECTRIC 2D-OPTICAL MICRO SCANNERS;

PIEZOELECTRIC DEVICES;

EID: 33745746523     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580600660140     Document Type: Article

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