Two-dimensional thermally actuated optical microprojector

Sensors and Actuators, A: Physical

Volumn 85, Issue 1, 2000, Pages 424-429

  Schweizer, S ^a   Cousseau, P ^a   Lammel, G ^a   Calmes, S ^b   Renaud, Ph ^a  

^a EPFL   (Switzerland)

^b Xros   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CANTILEVER BEAMS; COMPOSITE MICROMECHANICS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SCANNING; SILICON; STRUCTURAL FRAMES; THERMOANALYSIS; TWO DIMENSIONAL;

BIMORPH ACTUATORS; THERMALLY ACTUATED OPTICAL MICROPROJECTORS;

OPTICAL PROJECTORS;

EID: 0034248802     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00384-8     Document Type: Article

References (11)

1. Lau K.Y. MEMS: the world for optical beam manipulation. Circuits and Devices. 13(4):1997;1. July.
2. Kiang M.-H., Solgaard O., Lau K.Y., Muller R.S. Electrostatic combdrive actuated micromirrors for laser beam scanning and positioning. J. Microelectromech. Syst. 7:1998;27-37. March.
3. Conant R.A., Hagelin P.M., Krishnamoorthy U., Solgaard O., Lau K.Y., Muller R.S. A raster-scanning full motion display using polysilicon micromachined mirrors. Transducers '99, The 10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan, June 7-10:1999.
4. Totani H., Goto H., Ikeda M., Yada T. Miniature optical scanning range sensor utilising a silicon-micromachined scanner. Transducers '97, International Conference on Solid-State Sensors and Actuators, Chicago, June 16-19:1997;1275-1278.
5. Ohtuka Y., Nishikawa H., Koumura T., Hattori T. Two-dimensional optical scanner applying a torsional resonator with 2 degrees of freedom. MEMS '95. 1995;306-309.
6. Schroth S., Lee C., Matsumoto S., Tanaka M., Maeda R. Application of sol-gel deposited thin PZT film for actuation of 1D and 2D scanners. MEMS '98. 1998;402-407.
7. Motamedi M.E., Park S., Melendes R., Wang A., Andrews A.P., Garcia-Nunez D., Jinar D., Richardson P.D., Studer J., Chen J., DeNatale J., Moranski J.A. MOEM scan engine for bar code reading and factory automation. Miniaturized Systems with MicroOptics and Micromechanics III. Proc. SPIE. 3276:1998;66-80. January.
8. Schweizer S., Calmes S., Laudon M., Renaud Ph. Thermally actuated optical microscanner with large angle and low consumption. Sensors and Actuators, A. 76:1999;470-477.
9. Takeshima N., Gabriel K.J., Ozaki M., Takahashi J., Horigushi H., Fujita H. Electrostatic parallelogram actuators. Transducers '91. 1991;63-66.
10. Inoue T., Osatake H. A new drying method of biological specimens for SEM: the t-butyl alcohol freeze-drying method. Arch. Histol. Cytol. 51(1):1988;53-59.
11. Hecht E. Optics. 3rd edn. 1998;Pergamon.