Optical scanner on a three-dimensional microoptical bench

Journal of Lightwave Technology

Volumn 21, Issue 3, 2003, Pages 602-608

  Sasaki, Minoru ^a   Yamaguchi, T ^a   Song, J H ^a   Hane, K ^a   Hara, M ^b   Hori, K ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b SONY CORPORATION   (Japan)

Author keywords

Optical scanner; Resist spray coating; Three dimensional (3 D) microoptical bench

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COATING TECHNIQUES; MICROMACHINING; MICROOPTICS; MICROSTRUCTURE; PHOTOLITHOGRAPHY; SEMICONDUCTOR LASERS;

MICROOPTICAL BENCHES;

SCANNING;

EID: 0037617536     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/JLT.2003.811793     Document Type: Conference Paper

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