Micro-opto-mechanical 2 × 2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation

Journal of Lightwave Technology

Volumn 17, Issue 1, 1999, Pages 2-6

  Marxer, Cornel ^a   De Rooij, Nicolaas F ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

Author keywords

Electrostatic actuator; Fiber optic switch; Micro electro mechanical systems

Indexed keywords

CROSSTALK; ELECTROSTATIC DEVICES; FIBER OPTICS; LIGHT REFLECTION; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; PLASMA ETCHING; SEMICONDUCTING SILICON; SINGLE MODE FIBERS;

ELECTROSTATIC ACTUATORS; MICROELECTROOPTOMECHANICAL SWITCHES;

OPTICAL SWITCHES;

EID: 0032762248     PISSN: 07338724     EISSN: None     Source Type: Journal    
DOI: 10.1109/50.737413     Document Type: Article

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