Large-rotation and low-voltage driving of micromirror realized by tense thin-film torsion bar

IEEE Photonics Technology Letters

Volumn 18, Issue 15, 2006, Pages 1573-1575

  Sasaki, Minoru ^a   Yuki, Shinya ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Electrostatic driving; Low voltage driving; Micromirror; Tension; Thin film torsion bar

Indexed keywords

ELECTROSTATIC DEVICES; RIGIDITY; ROTATION; SEMICONDUCTING SILICON COMPOUNDS; THIN FILMS; TORSIONAL STRESS;

ELECTROSTATIC DRIVING; LOW-VOLTAGE DRIVING; MICROMIRROR; MIRROR ROTATION; THIN-FILM TORSION BAR;

MIRRORS;

EID: 33745958976     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2006.879587     Document Type: Article

References (13)

1. D. Hah, S. T. Huang, J. Tsai, H. Toshiyoshi, and M. C. Wu, "Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators," J. Microelectromech. Syst., vol. 13, pp. 279-289, Apr. 2004.
2. T. D. Kudrle, C. C. Wang, M. G. Bancu, J. C. Hsiao, A. Pareek, M. Waelti, G. A. Kirkos, T. Shone, C. D. Fung, and C. H. Mastrangelo, "Single-crystal silicon micromirror array with polysilicon flexures," Sens. Actuators, vol. A119, pp. 559-566, Apr. 2005.
3. G. Barillaro, A. Molfese, A. Nannini, and F. Pieri, "Analysis, simulation and relative performance of two kinds of serpentine springs," J. Micromech. Microeng., vol. 15, pp. 736-746, Feb. 2005.
4. V. A. Aksyuk, F. Pardo, D. Carr, D. Greywall, H. B. Chan, M. E. Simon, A. Gasparyan, H. Shea, V. Lifton, C. Bolle, S. Arney, R. Frahm, M. Paczkowski, M. Haueis, R. Ryf, D. T. Neilson, J. Kim, C. R. Giles, and D. Bishop, "Beam-steering micromirrors for large optical crossconnects," J. Lightw. Technol., vol. 21, no. 3, pp. 634-642, Mar. 2003.
5. A. M. Fennimore, T. D. Yuzvinsky, W.-Q. Han, M. S. Fuhrer, J. Cuming, and A. Zettl, "Rotational actuators based on carbon nanotubes," Nature, vol. 424, pp. 408-410, Jul. 2003.
6. M. Yano, F. Yamagishi, and T. Tsuda, "Optical MEMS for photonic switching-compact and stable optical crossconnect switches for simple, fast, and flexible wavelength applications in recent photonic networks," IEEE J. Sel. Topics Quantum Electron., vol. 11, no. 2, pp. 383-394, Mar./Apr. 2005.
7. S. Yuuki, M. Sasaki, and K. Hane, "Large-rotation and low-voltage driving realized by micromirror with vertical comb and tense thin film torsion bar," in Proc. 13th Int. Conf. Solid-State Sensors, Actuators and Microsystems, 2005, vol. 3A.1, pp. 1163-1166.
8. M. Sasaki, S. Yuuki, and K. Hane, "Performance of tense thin film torsion bar for large-rotation and low-voltage driving of micromirror," in Proc. Int. Conf. Optical MEMS and Their Applications 2005, 2005, vol. H5, pp. 129-130.
9. M. Sekimoto, H. Yoshihara, T. Ohkubo, and Y. Saitoh, "Silicon nitride single-layer X-ray mask," Jpn. J. Appl. Phys., vol. 20, pp. L669-L672, Sep. 1981.
10. S. D. Senturia, Microsystem Design. New York: Springer, ch. 9.
11. M. Sasaki, D. Briand, W. Noell, N. de Rooij, and K. Hane, "Three-dimensional SOI-MEMS constructed by buckled bridges and vertical comb drive actuator," IEEE J. Sel. Topics Quantum Electron., vol. 10, no. 3, pp. 455-461, May/Jun. 2004.
12. L. Lin, A. P. Pisano, and R. T. Howe, "A micro strain gauge with mechanical amplifier," J. Microelectromech. Syst., vol. 6, pp. 313-321, Dec. 1997.
13. O. Tabata, K. Kawahata, S. Sugiyama, and I. Igarashi, "Mechanical property measurements of thin films using load-deflection of composite rectangular membranes," Sens. Actuators, vol. 20, pp. 135-141, Nov. 1989.