Phase shifted addressing using a spatial light modulator

Microelectronic Engineering

Volumn 78-79, Issue 1-4, 2005, Pages 398-403

  Ljungblad, Ulric ^a   Martinsson, Hans ^a   Sandström, Torbjörn ^a  

^a Micronic Laser Systems AB   (Sweden)

Author keywords

Complex amplitude; Lithography; Micro mirror; Phase shift; SLM

Indexed keywords

ACTUATORS; CMOS INTEGRATED CIRCUITS; COMPUTER AIDED DESIGN; ELECTRIC POTENTIAL; ELECTROSTATICS; IMAGE CODING; LITHOGRAPHY; MASKS; MIRRORS; PHASE SHIFT; SENSITIVITY ANALYSIS; STEPPING MOTORS;

COMPLEX AMPLITUDES; FOURIER PLANES; MICRO-MIRRORS; PHASE SHIFT LITHOGRAPHY;

LIGHT MODULATORS;

EID: 14944377076     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.01.010     Document Type: Conference Paper

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