MEMS optical scanners for microscopes

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 10, Issue 3, 2004, Pages 514-527

  Miyajima, Hiroshi ^a   Murakami, Kenzi ^a   Katashiro, Masahiro ^a  

^a OLYMPUS CORPORATION   (Japan)

Author keywords

Electromagnetic; Electrostatic; Laser scanning microscope (LSM); Optical scanner

Indexed keywords

DENSE WAVELENGTH DIVISION MULTIPLEXING; ELECTRIC CURRENTS; FREQUENCIES; IMAGING TECHNIQUES; LASERS; MICROSCOPES; OPTICAL SWITCHES; OSCILLATIONS; SCANNING; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

ELECTROMAGNETIC; ELECTROSTATIC; LASER SCANNING MICROSCOPE (LSM); OPTICAL SCANNER;

MICROELECTROMECHANICAL DEVICES;

EID: 4344596845     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2004.828487     Document Type: Article

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