Integrated polysilicon and DRIE bulk silicon micromachining for an electrostatic torsional actuator

Journal of Microelectromechanical Systems

Volumn 8, Issue 4, 1999, Pages 456-465

  Yeh, Jer Liang Andrew ^a   Jiang, Hongrui ^a   Tien, Norman C ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; REACTIVE ION ETCHING; SEMICONDUCTING SILICON;

DEEP REACTIVE ION ETCHING (DRIE) BULK SILICON MICROMACHINING; POLYSILICON SURFACE MICROMACHINING;

MICROMACHINING;

EID: 0033338025     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.809061     Document Type: Article

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