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Volumn 10, Issue 3, 2004, Pages 505-513

Theory and experiments of angular vertical comb-drive actuators for scanning micromirrors

Author keywords

Angular vertical comb drive (AVC) actuator; Micromirror; Silicon on insulator (SOI) microelectromechanical systems (MEMS); Staggered vertical comb drive (SVC) actuator

Indexed keywords

COMPUTER SIMULATION; ETCHING; FINITE ELEMENT METHOD; GLASS TRANSITION; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; PARAMETRIC DEVICES; PLASTIC DEFORMATION; SCANNING; SILICON WAFERS;

EID: 1942540397     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2004.829200     Document Type: Article
Times cited : (114)

References (18)
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  • 7
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    • Using extended BELST process in fabricating vertical comb actuator for optical application
    • J. Hsieh, C. C. Chu, J. M. L. Tsai, and W. Fang, "Using extended BELST process in fabricating vertical comb actuator for optical application," in Proc. IEEE/LEOS Int. Conf. Optical MEMS, 2002, pp. 133-134.
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  • 8
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    • D. Hah, S. T.-Y. Huang, J.-C. Tsai, H. Toshiyoshi, and M. C. Wu, "Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators," J. Microelectromech. Syst., vol. 13, pp. 279-289, Apr. 2002.
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    • H. Xie, Y. Pan, and G. K. Fedder, "A CMOS-MEMS mirror with curledhinge combdrives," J. Microelectromech. Syst., vol. 12, pp. 450-457, Aug. 2003.
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  • 15
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    • A. Selvakumar and K. Najafi, "Vertical comb array microactuators," J. Microelectromech. Syst., vol. 12, pp. 440-449, Aug. 2003.
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    • Selvakumar, A.1    Najafi, K.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.