Applications of SOI-based optical MEMS

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 8, Issue 1, 2002, Pages 148-154

  Noell, Wilfried ^a   Clerc, Pierre André ^a   Dellmann, Laurent ^a,b   Guldimann, Benedikt ^a,b   Herzig, Hans Peter ^a   Manzardo, Omar ^a   Marxer, Cornel Roman ^a,c   Weible, Kenneth J ^d   Dändliker, René ^a   De Rooij, Nicolaas ^a  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c Sercalo Microtechnology Ltd   (Liechtenstein)

^d Weible OpTech   (Switzerland)

Author keywords

Accelerometers; Attenuators; MOEMS; Optical devices; Optical MEMS; Spectrometers; Switches

Indexed keywords

ACCELEROMETERS; FOURIER TRANSFORMS; INSERTION LOSSES; MICROELECTROMECHANICAL DEVICES; OPTICAL FIBERS; OPTICAL SWITCHES; SILICON ON INSULATOR TECHNOLOGY; SPECTROMETERS; SWITCHING;

VARIABLE OPTICAL ATTENUATORS (VOI);

OPTICAL SYSTEMS;

EID: 0036248275     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/2944.991410     Document Type: Article

References (18)

1. Micro-optomechanical 2 × 2 switch for single-mode fibers based on a plasma-etched silicon mirror and electrostatic actuation
2. A planar latch-up microactuator driven by thermoelastic force
3. A variable optical attenuator based on silicon micromechanics
4. 4 × 4 Matrix switch based on mems switches and integrated waveguides
5. Lowloss fiber-matched lowtemperature PECVD waveguides with small-core dimensions for opileal communication systems
6. Design, fabrication and testing of micro-optical components for sensors and microsystems
7. Fabrication process of high aspect ratio elastic and SU-8 structures for piezoelectric motor applications
8. Micromachining applications of a high resolution ultrathick photoresist
9. Introductory fourier transform spectroscopy
10. Miniaturized time-scanning fourier transform spectrometer based on silicon technology
11. Optics and actuators for miniaturized spectrometers
12. Multimode fiber-optic accelerometers
13. A micromachined silicon accelerometer with fiber optic interrogation
14. Fiber-optic accelerometer using silicon micromachined techniques
15. Lateral optical accelerometer micromachined in (100) silicon with remote readout based on coherence modulation
16. MEMS versus MOMS from a systems point of view
17. Fiber Optic - MEMS accelerometer with high mass displacement resolution