3-D MOEMS mirror for laser beam pointing and focus control

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 10, Issue 3, 2004, Pages 528-535

  Shao, Yuhe ^a   Dickensheets, David L ^a   Himmer, Phillip ^a  

^a MONTANA STATE UNIVERSITY   (United States)

Author keywords

Microelectromechanical systems (MEMS); Microoptoelectromechanical systems (MOEMS); Scan mirror; Scanner; Three dimensional (3 D) mirror; Tip tilt mirror; Torsion mirror; Variable focus lens

Indexed keywords

CHARGE COUPLED DEVICES; ELECTRODES; FREQUENCIES; LENSES; MICROELECTROMECHANICAL DEVICES; MICROSCOPES; MIRRORS; OPTICAL SWITCHES; POWER SUPPLY CIRCUITS; SCANNING; TELECOMMUNICATION SYSTEMS;

MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROOPTOELECTROMECHANICAL SYSTEMS (MOEMS); SCAN MIRROR; SCANNER; THREE-DIMENSIONAL (3-D) MIRROR; TORSION MIRROR; VARIABLE FOCUS LENS;

LASER BEAMS;

EID: 4344637103     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2004.828484     Document Type: Article

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