Anisotropic Si etching condition for preparing optically smooth surfaces

Sensors and Materials

Volumn 15, Issue 2, 2003, Pages 83-92

  Sasaki, Minoru ^a   Fujii, Takehiro ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Anisotropic etching; Microcavity; Surface roughness; 110 surface

Indexed keywords

EID: 0037677650     PISSN: 09144935     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)

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