Scratch drive actuator with mechanical links for self-assembly of three-dimensional MEMS

Journal of Microelectromechanical Systems

Volumn 6, Issue 1, 1997, Pages 10-17

  Akiyama, Terunobu ^a,b,f,g   Collard, Dominique ^{a,c,d,h,i,j,k,l,m}   Fujita, Hiroyuki ^a,d,e,n,o  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

^b UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^c INSTITUT D ELECTRONIQUE   (France)

^d UNIVERSITY OF TOKYO   (Japan)

^e IEEE

^f SOPHIA UNIVERSITY   (Japan)

^g UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^h Institut Superieur de l'Electronique et du Numerique   (France)

ⁱ UNIV LILLE   (France)

^j TOSHIBA CORPORATION   (Japan)

^k Centre National de la Recherche Scientique   (France)

^l Lab Intgd MicroMechatronic S   (Japan)

^m Centre National de la Recherche Scientifique   (Japan)

ⁿ MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^o Japan Soc of Cryogenic Engineering   (Japan)

more..

Author keywords

Electrostatic devices; Fabrication; Microactuators; Microelectromechanical devices; Position control

Indexed keywords

ELECTROSTATIC DEVICES; EQUIPMENT TESTING; FABRICATION; LOADS (FORCES); MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POSITION CONTROL; SEMICONDUCTING FILMS; SEMICONDUCTING SILICON; THREE DIMENSIONAL;

BUCKLING BEAMS; DISPLACEMENT; MECHANICAL LINKS; MICROACTUATORS; POLYSILICON STRUCTURES; SCRATCH DRIVE ACTUATOR; THRESHOLD FORCE;

ACTUATORS;

EID: 0031098222     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.557525     Document Type: Article

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