Single-crystalline silicon micromirrors actuated by self-aligned vertical electrostatic combdrives with piston-motion and rotation capability

Sensors and Actuators, A: Physical

Volumn 114, Issue 2-3, 2004, Pages 423-428

  Lee, Daesung ^a   Krishnamoorthy, Uma ^a   Yu, Kyoungsik ^a   Solgarrd, Olav ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

Double stacked SOI; Multi level electrical isolation; Scanning micromirrors; Self alignment; Vertical combdrives

Indexed keywords

ACTUATORS; CAVITY RESONATORS; ELECTROSTATICS; MICROSCOPES; MIRRORS; REACTIVE ION ETCHING; ROTATION; SCANNING; SCANNING ELECTRON MICROSCOPY; SILICON SENSORS; SILICON WAFERS; THICKNESS CONTROL;

DOUBLE STACKED SOI (SILICON-ON-INSULATOR); MULTI LEVEL ELOECTRICAL ISOLATION; SCANNING MICROMIRRORS; SELF-ALIGNMENT; VERTICAL COMBDRIVES;

SINGLE CRYSTALS;

EID: 4344681317     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2003.11.024     Document Type: Article

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