Laterally actuated torsional micromirrors for large static deflection

IEEE Photonics Technology Letters

Volumn 15, Issue 2, 2003, Pages 245-247

  Milonovíc, Veljko ^a   Last, Matthew ^b   Pister, Kristofer S J ^b  

^a Adriatic Research Institute   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Comb drive; High aspect ratio; MEMS; Microfabrication; Micromachining; Micromirror; MOEMS; Optical MEMS; Static deflection

Indexed keywords

ASPECT RATIO; ELECTROSTATIC ACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; NATURAL FREQUENCIES; SILICON ON INSULATOR TECHNOLOGY;

LARGE STATIC DEFLECTION; MICROFABRICATION; TORSIONAL MICROMIRRORS;

MIRRORS;

EID: 0037320894     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2002.806085     Document Type: Article

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