Piezoresistive rotation angle sensor integrated in micromirror

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 45, Issue 4 B, 2006, Pages 3789-3793

  Sasaki, Minoru ^a   Tabata, Motoki ^a   Haga, Tsukasa ^a   Hane, Kazuhiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Microactuator; Micromirror; Rotation angle sensor; Shear piezoresistance coefficient

Indexed keywords

CRYSTAL ORIENTATION; ELECTRIC POTENTIAL; MICROACTUATORS; MIRRORS; ROTATION; TORSIONAL STRESS;

MICROMIRROR DEVICES; PIEZORESISTIVE ROTATION ANGLE SENSOR; SENSOR SIGNALS; SHEAR PIEZORESISTANCE COEFFICIENT; TORSION BAR;

PIEZOELECTRIC DEVICES;

EID: 33646945605     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.45.3789     Document Type: Article

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