DMD reliability: A MEMS success story

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4980, Issue , 2003, Pages 1-11

  Douglass, Michael R ^a  

^a TEXAS INSTRUMENTS   (United States)

Author keywords

Characterization; DLP ; DMD; MEMS; Picture reliability; Reliability; Testing

Indexed keywords

ELECTRONICS PACKAGING; FAILURE ANALYSIS; MIRRORS; RELIABILITY; TESTING;

DIGITAL MICROMIRROR DEVICES (DMD);

MICROELECTROMECHANICAL DEVICES;

EID: 0038735425     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.478212     Document Type: Conference Paper

References (9)

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