Dual-mode micromirrors for optical phased array applications

Sensors and Actuators, A: Physical

Volumn 97-98, Issue , 2002, Pages 21-26

  Krishnamoorthy, U ^a,b   Li, K ^a   Yu, K ^b   Lee, D ^b   Heritage, J P ^a   Solgaard, O ^b  

^a University of California   (United States)

^b Stanford University   (United States)

Author keywords

Electrostatic actuators; Micromirrors; Optical phased arrays; Pure torsional actuation

Indexed keywords

ARRAYS; ELECTRODES; ELECTROSTATIC ACTUATORS; MICROELECTRONICS; SYSTEMS ANALYSIS;

DUAL MODE MICROMIRRORS; OPTICAL BEAMS; OPTICAL PHASED ARRAYS; PURE TORSIONAL ACTUATION;

MIRRORS;

EID: 0036544386     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(01)00814-7     Document Type: Conference Paper

References (8)

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