Curvature compensation in micromirrors with high-reflectivity optical coatings

Journal of Microelectromechanical Systems

Volumn 10, Issue 3, 2001, Pages 409-417

  Cao, Ke ^b   Liu, W ^b   Talghader, Joseph J ^a,b  

^a IEEE   (United States)

^b University of Minnesota   (United States)

Author keywords

Aberration; Mirror flatness; Optical coatings; Plastic deformation; Stress

Indexed keywords

CURVATURE COMPENSATION; HIGH REFLECTIVITY OPTICAL COATINGS; MICROMIRRORS; MIRROR FLATNESS;

ABERRATIONS; DIELECTRIC MATERIALS; MIRRORS; OPTICAL COATINGS; PLASTIC DEFORMATION; POLYSILICON; REFLECTION; STRAIN; STRESSES; THIN FILMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0035440595     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.946795     Document Type: Article

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