A 5-V operated MEMS variable optical attenuator by SOI bulk micromachining

IEEE Journal on Selected Topics in Quantum Electronics

Volumn 10, Issue 3, 2004, Pages 570-578

  Isamoto, Keiji ^a   Kato, Kazuya ^a   Morosawa, Atsushi ^a   Chong, Changho ^a   Fujita, Hiroyuki ^b   Toshiyoshi, Hiroshi ^b  

^a Santec Corporation   (Japan)

^b INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Microelectromechanical systems (MEMS); Optical MEMS; Variable optical attenuator (VOA)

Indexed keywords

ACTUATORS; ELECTRIC ATTENUATORS; ELECTRIC POTENTIAL; MICROELECTROMECHANICAL DEVICES; MIRRORS; OPTICAL FIBERS; POLARIZATION; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS; TELECOMMUNICATION NETWORKS; WAVELENGTH DIVISION MULTIPLEXING;

MECHANICAL FAILURE; MICROELECTROMECHANICAL SYSTEMS (MEMS); OPTICAL MEMS; VARIABLE OPTICAL ATTENUATOR (VOA); WAVELENGTH MULTIPLEXING (MUX);

MICROMACHINING;

EID: 4344614531     PISSN: 1077260X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSTQE.2004.828475     Document Type: Article

References (11)

1. V. Aksyuk, B. Barber, C. R. Giles, R. Ruel, L. Stulz, and D. Bishop, "Low insertion loss package and fiber connectorised MEMS reflective optical switch." Electron. Lett., vol. 34, no. 14, pp. 1413-1414, 1998.
2. C.-H. Ji, Y. Yee, J. Choi, and J.-U. Bu, "Electromagnetic variable optical attenuator." in 2002 IEEE/LEOS Int. Conf. Optical MEMS, pp. 49-50.
3. S.-S. Yun, Y.-Y. Kim, H.-N, Kown, W.-H. Kim, J.-H. Lee, Y.-G. Lee, and S.-C. Jung, "Optical characteristics of a micromachined VOA using successive partial transmission in a silicon optical leaker," in 2002 IEEE/LEOS Int. Conf. Optical MEMS, pp. 51-52.
4. |4] C.-H. Kim, N. Park, and Y.-K. Kim, "MEMS reflective type variable optical attenuator using off-axis misalignment," in 2002 IEEE/LEOS Int. Conf. Optical MEMS, pp. 55-56.
5. C. Marxer, B. de Jong, and N. de Rooij. "Comparison of MEMS variable optical attenuator designs," in 2002 IEEE/LEOS Int. Conf. Optical MEMS, pp. 189-190.
6. W. Noell, P.-A. Clerc, L. Dellmann, B. Guldimann, H.-P. Herzig, O. Manzardo, C. R. Marxer, K. J. Weible, R. Dändliker, and N. de Rooij, "Applications of SOI-based optical MEMS," IEEE J. Select. Topics Quantum Electron., vol. 8, pp. 148-154, Jan.-Feb. 2002.
7. J. E. Ford and J. A. Walker, "Dynamic spectral power equalization using micro-opto-mechanics," IEEE Photon. Technol. Lett., vol. 10, pp. 1440-1442, Oct. 1998.
8. H. Toshiyoshi, M. Goto, M. Mita, H. Fujita, D. Kobayashi, G. Hashiguchi, J. Endo, and Y. Wada, "Fabrication of micromechanical tunneling probes and actuators on a silicon chip," Jpn. J. Appl. Phys., pt. 1, vol. 38, pp. 7185-7189, Dec. 1999.
9. M. A. Meyers and K. K. Chawla. Mechanical Behavior of Materials. Englewood Cliffs, NJ: Prentice-Hall. 1999.
10. H. Toshiyoshi and H. Fujita, "Electrostatic micro torsion mirrors for an optical switch matrix," J. Microelectromech. Syst., vol. 5, pp. 231-237, Dec. 1996.
11. H. Toshiyoshi, W. Piyawaitanametha, C.-T. Char., and M. C. Wu, "Linearization of electrostatically actuated surface micromachined 2D optical scanner," J. Microelectromech. Syst., vol. 10. pp. 205-214, June 2001.