Thermally actuated optical microscanner with large angle and low consumption

Sensors and Actuators, A: Physical

Volumn 76, Issue 1-3, 1999, Pages 470-477

  Schweizer, S ^a   Calmes, S ^b   Laudon, M ^c   Renaud, Ph ^a  

^a EPFL   (Switzerland)

^b STANFORD UNIVERSITY   (United States)

^c LOS ALAMOS NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRON DEVICE MANUFACTURE; ETCHING; INTEGRATED OPTICS; MASKS; MICROMACHINING; MIRRORS; NATURAL FREQUENCIES; RESIDUAL STRESSES; SEMICONDUCTING SILICON; SILICA; THIN FILMS;

BIMORPH; OPTICAL MICROSCANNER; POWER CONSUMPTION; SILICON BULK ETCHING; SILICON MICROMACHINING;

SCANNING;

EID: 0343022405     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(99)00012-6     Document Type: Article

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