Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review

Sensors and Actuators, B: Chemical

Volumn 143, Issue 2, 2010, Pages 606-619

  Fu, Y Q ^a,b   Luo, J K ^b,c   Du, X Y ^b   Flewitt, A J ^b   Li, Y ^d   Markx, G H ^a   Walton, A J ^d   Milne, W I ^b  

^a HERIOT WATT UNIVERSITY   (United Kingdom)

^b UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^c UNIVERSITY OF BOLTON   (United Kingdom)

^d UNIVERSITY OF EDINBURGH   (United Kingdom)

Author keywords

Biosensor; FBAR; Film; Lab on chip; Microfluidics; SAW; ZnO

Indexed keywords

ACOUSTIC WAVE DEVICE; BIOSENSING; DIAGNOSTIC SYSTEMS; FILM BULK ACOUSTIC RESONATORS; FLUID MIXING; HIGH QUALITY; HIGHLY SENSITIVE; LAB ON CHIP; LAB-ON-A-CHIP; LOVE-WAVE; MICRO FLUIDIC APPLICATIONS; PIEZOELECTRIC PROPERTY; RF-MAGNETRON SPUTTERING; SHEAR HORIZONTALS; SMALL SCALE; SURFACE CONDITIONS; WAVE MODES; ZNO; ZNO FILMS; ZNO THIN FILM;

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE FILTERS; ACOUSTIC WAVES; ACOUSTICS; BIOSENSORS; MAGNETRON SPUTTERING; METALLIC FILMS; MICROFLUIDICS; ZINC OXIDE;

FILM PREPARATION;

EID: 73249138706     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2009.10.010     Document Type: Article

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