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Volumn 225, Issue 2-4, 2001, Pages 197-201
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Control of morphology and orientation of ZnO thin films grown on SiO2/Si substrates
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Author keywords
A3. Metalorganic chemical vapor deposition; B2. Piezoelectric materials; B2. Semiconducting II VI materials
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Indexed keywords
ACOUSTIC SURFACE WAVE DEVICES;
CRYSTAL GROWTH;
CRYSTAL ORIENTATION;
DIELECTRIC FILMS;
ENERGY GAP;
FILM GROWTH;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
MORPHOLOGY;
OPTICAL PROPERTIES;
PIEZOELECTRIC MATERIALS;
SEMICONDUCTING SILICON;
SEMICONDUCTING ZINC COMPOUNDS;
SEMICONDUCTOR GROWTH;
SILICA;
THIN FILMS;
ZINC OXIDE;
ELECTROMECHANICAL COUPLING COEFFICIENT;
SCANNING PROBE MICROSCOPY;
SEMICONDUCTING FILMS;
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EID: 0035335462
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(01)00874-0 Document Type: Conference Paper |
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Times cited : (124)
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References (12)
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