ZnO-based film bulk acoustic resonator for high sensitivity biosensor applications

Applied Physics Letters

Volumn 90, Issue 14, 2007, Pages

  Yan, Z ^a,b   Zhou, X Y ^d   Pang, G K H ^d   Zhang, T ^a   Liu, W L ^a   Cheng, J G ^a   Song, Z T ^a   Feng, S L ^a   Lai, L H ^c   Chen, J Z ^c   Wang, Y ^b  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^c EAST CHINA NORMAL UNIVERSITY   (China)

^d NONE

Author keywords

[No Author keywords available]

Indexed keywords

BIOSENSORS; CRYSTALLIZATION; MAGNETRON SPUTTERING; PIEZOELECTRIC MATERIALS; THIN FILMS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; ZINC OXIDE;

BIOSPECIES; MASS SENSITIVITY; PIEZOELECTRIC ELEMENTS; THIN FILM LAYERS;

ACOUSTIC RESONATORS;

EID: 34047259667     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2719149     Document Type: Article

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