An investigation of the dependence of ZnO film on the sensitivity of Love mode sensor in ZnO/quartz structure

Ultrasonics

Volumn 41, Issue 2, 2003, Pages 133-139

  Chu, Sheng Yuan ^a   Water, Walter ^a   Liaw, Jih Tsang ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

Love mode; ST cut quartz; ZnO

Indexed keywords

BIOSENSORS; QUARTZ; SUBSTRATES; VISCOSITY; ZINC OXIDE;

LOVE MODE SENSORS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 0037360597     PISSN: 0041624X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0041-624X(02)00430-4     Document Type: Article

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