Effects of lattice mismatches in ZnO/substrate structures on the orientations of ZnO films and characteristics of SAW devices

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 296-301

  Lee, Jin Bock ^a   Lee, Myung Ho ^a   Park, Chang Kyun ^a   Park, Jin Seok ^a  

^a Hanyang University   (South Korea)

Author keywords

C axis preferred orientation; Crystallite size; Insertion loss; Lattice mismatch; SAW device; ZnO film and multilayer

Indexed keywords

ACOUSTIC WAVES; BANDPASS FILTERS; CRYSTAL LATTICES; CRYSTAL ORIENTATION; MATHEMATICAL MODELS; MONOLITHIC MICROWAVE INTEGRATED CIRCUITS; MULTILAYERS; POLYCRYSTALLINE MATERIALS; SILICA; SINGLE CRYSTALS; SURFACE WAVES; WIRELESS TELECOMMUNICATION SYSTEMS;

CRYSTALLITE SIZE; INSERTION LOSS; LATTICE MISMATCH;

ZINC OXIDE;

EID: 1342344899     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)01067-8     Document Type: Conference Paper

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