Material and device properties of ZnO-based film bulk acoustic resonator for mass sensing applications

Applied Surface Science

Volumn 253, Issue 24, 2007, Pages 9372-9380

  Yan, Zhi ^a,b   Song, Zhitang ^a   Liu, Weili ^a   Ren, Hongxuan ^c   Gu, Ning ^c   Zhou, Xiaoyuan ^b   Zhang, Li ^b   Wang, Yu ^b   Feng, Songlin ^a   Lai, Lihui ^d   Chen, Jianzhao ^d  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b HONG KONG POLYTECHNIC UNIVERSITY   (Hong Kong)

^c SOUTHEAST UNIVERSITY   (China)

^d EAST CHINA NORMAL UNIVERSITY   (China)

Author keywords

Mass sensor; Resonator; Sputtering; ZnO film

Indexed keywords

BIOSENSORS; CRYSTALLIZATION; DEPOSITION; SPUTTERING; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION; ZINC OXIDE;

BIO-SPECIMEN; DEVICE PROPERTIES; MASS SENSING; PIEZOELECTRIC TESTS;

ACOUSTIC RESONATORS;

EID: 34548514505     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.05.081     Document Type: Article

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