Development of high frequency ZnO/SiO2/Si Love mode surface acoustic wave devices

Solid-State Electronics

Volumn 50, Issue 6, 2006, Pages 1113-1118

  Krishnamoorthy, S ^a   Iliadis, A A ^a,b  

^a UNIVERSITY OF MARYLAND   (United States)

^b UNIVERSITY OF THE AEGEAN   (Greece)

Author keywords

Love waves; SAW device; Si; SiO2; ZnO

Indexed keywords

ACOUSTIC WAVE EFFECTS; ACOUSTIC WAVE PROPAGATION; OPTIMIZATION; SILICA; SILICON; THIN FILMS; VELOCITY MEASUREMENT;

LOVE WAVES; MULTIPLE NON-HARMONIC FREQUENCIES; SAW DEVICE; SIO2; ZNO;

ZINC OXIDE;

EID: 33745738984     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2006.04.033     Document Type: Article

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