Solidly mounted ZnO shear mode film bulk acoustic resonators for sensing applications in liquids

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 53, Issue 2, 2006, Pages 492-496

  Link, Mathias ^a,b   Schreiter, Matthias ^a   Weber, Jan ^a   Primig, Robert ^a   Pitzer, Dana ^a   Gabl, Reinhard ^a  

^a SIEMENS AG   (Germany)

^b INSTITUT JEAN LAMOUR   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTICS; BIOSENSORS; MAGNETRON SPUTTERING; THIN FILMS; ZINC OXIDE;

FILM BULK ACOUSTIC RESONATORS (FBAR); SENSING APPLICATIONS;

RESONATORS;

ZINC OXIDE;

ARTIFICIAL MEMBRANE; CHEMISTRY; DRUG MIXTURE; EQUIPMENT; EQUIPMENT DESIGN; EVALUATION; GENETIC PROCEDURES; INSTRUMENTATION; LETTER; METHODOLOGY; SOLUTION AND SOLUBILITY; TRANSDUCER;

BIOSENSING TECHNIQUES; COMPLEX MIXTURES; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; MEMBRANES, ARTIFICIAL; SOLUTIONS; TRANSDUCERS; ZINC OXIDE;

EID: 33645088439     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2006.1593389     Document Type: Article

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