Effective electromechanical coupling coefficient (kt2) for fundamental mode of thickness extensional mode thin film bulk acoustic wave resonator fabricated by ZnO thin film

Vacuum

Volumn 66, Issue 3-4, 2002, Pages 463-466

  Takeuchi, Masaki ^a   Yamada, Hajime ^a   Yoshino, Yukio ^a   Makino, Takahiro ^a   Arai, Seiichi ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ACOUSTIC RESONATORS; COUPLED CIRCUITS; FINITE ELEMENT METHOD; NATURAL FREQUENCIES; PIEZOELECTRIC MATERIALS; ZINC OXIDE;

ELECTROMECHANICAL COUPLING COEFFICIENTS; THIN FILM BULK ACOUSTIC WAVE RESONATORS (TBAR);

THIN FILMS;

EID: 0037136152     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0042-207X(02)00116-1     Document Type: Article

References (6)

1. The 150th Committee of Nihon gakujutsu shinkoukai danseiha soshi gijutu