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Applied Surface Science

Volumn 241, Issue 3-4, 2005, Pages 321-325

Dry etching of surface textured zinc oxide using a remote argon-hydrogen plasma

(3) Groenen, R a Creatore, M a Sanden, M C M Van De a

a EINDHOVEN UNIVERSITY OF TECHNOLOGY (Netherlands)

Author keywords

Remote plasma; Surface modification; Zinc oxide

Indexed keywords

ARGON; DEPOSITION; ETCHING; HYDROGEN; OPTOELECTRONIC DEVICES; ORGANIC COMPOUNDS; SURFACE TREATMENT; THERMAL EFFECTS;

ATOMIC HYDROGEN; CASCADED ARC; HYDROGEN PLASMA; REMOTE PLASMA;

ZINC OXIDE;

EID: 11444262574 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2004.07.034 Document Type: Article

Times cited : (23)

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