Fabrication and characterization of high frequency SAW device with IDT/ZnO/AlN/Si configuration: Role of AlN buffer

Thin Solid Films

Volumn 447-448, Issue , 2004, Pages 605-609

  Jung, Jun Phil ^a   Lee, Jin Bock ^a   Kim, Jung Sun ^a   Park, Jin Seok ^a  

^a Hanyang University   (South Korea)

Author keywords

(0002) orientation; AlN buffer; Crystal quality; Insertion loss; Piezoelectric ZnO thin film; SAW device; Surface roughness

Indexed keywords

ALUMINUM NITRIDE; CORRELATION METHODS; CRYSTAL ORIENTATION; FREQUENCY RESPONSE; INSERTION LOSSES; MAGNETRON SPUTTERING; MOLECULAR BEAM EPITAXY; MORPHOLOGY; PIEZOELECTRIC DEVICES; SURFACE ROUGHNESS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

ALN BUFFERS; CRYSTAL QUALITY; PIEZOELECTRIC ZNO THIN FILMS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 1342323666     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.07.022     Document Type: Conference Paper

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