Shear bulk wave transducer made of (112̄0)-plane epitaxial ZnO film on R-sapphire

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 41, Issue 5 B, 2002, Pages 3281-3284

  Kadota, Michio ^a   Miura, Toshinori ^a  

^a MURATA MANUFACTURING CO LTD   (Japan)

Author keywords

(112 0) plane ZnO film; Epitaxial ZnO film; R sapphire; Shear bulk wave; Transducer

Indexed keywords

DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRODES; SAPPHIRE; TRANSDUCERS; ZINC OXIDE;

EPITAXIAL FILMS; SHEAR BULK WAVE TRANSDUCER;

ACOUSTIC BULK WAVE DEVICES;

EID: 0036578491     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.41.3281     Document Type: Article

References (11)