Microfabricated lamb wave device based on PZT sol-gel thin film for mechanical transport of solid particles and liquids

Journal of Microelectromechanical Systems

Volumn 6, Issue 4, 1997, Pages 337-346

  Luginbuhl, Philippe ^a,d   Collins, Scott D ^{a,b,d,e,f,g,h,i,j}   Racine, Georges André ^a,d   Grétillat, Marc Alexis ^a,d   De Rooij, Nicolaas F ^a,c,k,l,m,n   Brooks, Keith G ^c,o,p   Setter, Nava ^{c,p,q,r,s,t,u}  

^a UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^b University of California   (United States)

^c EPFL   (Switzerland)

^d UNIVERSITY OF NEUCHÂTEL   (Switzerland)

^e BRIGHAM YOUNG UNIVERSITY   (United States)

^f Department of Electrical and Computer Engineering   (United States)

^g ABBOTT LABORATORIES   (United States)

^h Damien Associates   (United States)

ⁱ AKZO NOBEL CENTRAL RESEARCH   (Netherlands)

^j CSEM   (Switzerland)

^k UTRECHT UNIVERSITY   (Netherlands)

^l UNIVERSITY OF TWENTE   (Netherlands)

^m R and D Department   (Netherlands)

ⁿ ETH ZURICH   (Switzerland)

^o ALFRED UNIVERSITY   (United States)

^p PENNSYLVANIA STATE UNIVERSITY   (United States)

^q TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^r UNIVERSITY OF OXFORD   (United Kingdom)

^s UNIVERSITY OF GENEVA   (Switzerland)

^t R and D Laboratories   (Israel)

^u Swiss Academy of Technical Sciences   (Switzerland)

more..

Author keywords

Flexural plate waves; Lamb wave acoustic transducers; Micropump; Microtransport; PZT sol gel thin film

Indexed keywords

ACOUSTIC TRANSDUCERS; FABRICATION; LIQUIDS; MICROMACHINING; PIEZOELECTRIC MATERIALS; PIEZOELECTRIC TRANSDUCERS; SENSORS; SILICON NITRIDE; SOL-GELS; THIN FILMS;

ACOUSTIC LAMB WAVE ACTUATOR; DUAL INTERDIGITATED TRANSDUCERS; LIQUID DELIVERY SYSTEMS; LOW PRESSURE CHEMICAL VAPOR DEPOSITION;

ACTUATORS;

EID: 0031354318     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.650131     Document Type: Article

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