The compatibility of ZnO piezoelectric film with micromachining process

Sensors and Actuators, A: Physical

Volumn 104, Issue 1, 2003, Pages 61-67

  Xu, Tao ^a   Wu, Guoying ^b   Zhang, Guobing ^b   Hao, Yilong ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b PEKING UNIVERSITY   (China)

Author keywords

MEMS; Micromachining process; Microsensor fabrication; Process compatibility; ZnO piezoelectric films

Indexed keywords

MICROELECTROMECHANICAL DEVICES; MICROMACHINING; PASSIVATION; PHOTORESISTS; PIEZOELECTRIC MATERIALS; REACTIVE ION ETCHING;

PROCESS COMPATIBILITY;

MICROSENSORS;

EID: 0037445453     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(02)00484-3     Document Type: Article

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