Numerical calculation of SAW sensitivity: Application to ZnO/LiTaO 3 transducers

Sensors and Actuators, A: Physical

Volumn 115, Issue 2-3 SPEC. ISS., 2004, Pages 456-461

  Powell, David A ^a,b   Kalantar Zadeh, Kourosh ^a,b   Wlodarski, Wojtek ^a,b  

^a RMIT UNIVERSITY   (Australia)

^b CRC for Microtechnology   (Australia)

Author keywords

Layered media; LiTaO 3; SAW sensor; Sensitivity; ZnO

Indexed keywords

CRYSTALS; GREEN'S FUNCTION; LITHIUM COMPOUNDS; SUBSTRATES; TRANSDUCERS; ZINC OXIDE;

ELECTROMECHANICAL COUPLING; LAYERED MEDIA; SURFACE ACOUSTIC WAVE SENSORS;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 4544234252     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.05.031     Document Type: Conference Paper

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