C -axis inclined ZnO films for shear-wave transducers deposited by reactive sputtering using an additional blind

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 2, 2006, Pages 218-222

  Link, M ^a   Schreiter, M ^a   Weber, J ^a   Gabl, R ^a   Pitzer, D ^a   Primig, R ^a   Wersing, W ^a   Assouar, M B ^b   Elmazria, O ^b  

^a SIEMENS AG   (Germany)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC RESONATORS; ALUMINA; ELECTROMECHANICAL DEVICES; SCANNING ELECTRON MICROSCOPY; SHEAR WAVES; SILICA; SPUTTER DEPOSITION; TRANSDUCERS; X RAY DIFFRACTION ANALYSIS; ZINC OXIDE;

BUFFER LAYERS; ELECTROMECHANICAL COUPLING CONSTANTS;

THIN FILMS;

EID: 33644504217     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2165658     Document Type: Article

References (16)

1. N. F. Foster, G. A. Coquin, G. A. Rozgonyi, and F. A. Vannatta, IEEE Trans. Sonics Ultrason. SU-15, 28 (1968).
2. R. Gabl, H.-D. Feucht, H. Zeininger, G. Eckstein, M. Schreiter, R. Primig, D. Pitzer, and W. Wersing, Biosens. Bioelectron. 19, 615 (2004).
3. M. Kadota and T. Miura, Jpn. J. Appl. Phys., Part 1 41, 3281 (2002).
4. K. Wasa, S. Hayakawa, and T. Hada, IEEE Trans. Sonics Ultrason. SU-21, 298 (1974).
5. N. F. Foster, J. Appl. Phys. 40, 4202 (1969).
6. A. G. Veselov and A. S. Dzhumaliev, Tech. Phys. 45, 497 (2000).
7. S. V. Krishnaswamy, B. R. McAvoy, and W. J. Takei, Proc.-IEEE Ultrason. Symp. 476 (1982).
8. Y. E. Lee, S. G. Kim, Y. J. Kim, and H. J. Kim, J. Vac. Sci. Technol. A 15, 1194 (1997).
9. D. Howell, L. Goddard, and B. T. Khuri-Yakub, Proc.-IEEE Ultrason. Symp. 381 (1987).
10. H. W. Lehmann and R. Widmer, J. Appl. Phys. 44, 3868 (1973).
11. J. S. Wang and K. M. Lakin, Appl. Phys. Lett. 42, 352 (1983).
12. I. Cerven, T. Lacko, I. Novotny, V. Tvarozek, and M. Harvanka, J. Cryst. Growth 131, 546 (1993).
13. L. Abelmann and C. Lodder, Thin Solid Films 305, 1 (1997).
14. J. F. Rosenbaum, Bulk Acoustic Wave Theory and Devices (Artech House, Norwood, MA, 1988).
15. R. S. Naik, J. J. Lutsky, R. Reif, and C. G. Sodini, IEEE Trans. Ultrason. Ferroelectr. Freq. Control 45, 257 (1998).
16. J. G. E. Gardeniers, Z. M. Rittersma, and G. J. Burger, J. Appl. Phys. 83, 7844 (1998).